11 Series Available
Select a series to view detailed specifications, dimensional drawings, and ordering information.
UHPStandard UHP Manual Diaphragm Valve
Springless hard-metal diaphragm seal for ultra-high purity semiconductor gas service. Low and high pressure variants in a single series.
UHPPneumatic NC/NO Diaphragm Valve
Fast, repeatable pneumatic actuation with hard-metal diaphragm seal for UHP semiconductor gas service.
UHPManual Diaphragm Valve with Status Indicator & LOTO
Visual open/close status indicator and optional LOTO lockout for safety-critical UHP gas isolation points.
HPHigh-Pressure Small-Flow Diaphragm Valve —DV4 Series
High-pressure small-flow diaphragm valve for ultra-high purity applications. GP/HP/UHP three process grades available.
HPHigh-Pressure Medium-Flow Diaphragm Valve —DV5 Series
High-pressure medium-flow diaphragm valve for ultra-high purity applications. Spring-loaded design. GP/HP/UHP three process grades available.
HPMedium-Pressure Medium-Flow Diaphragm Valve —DV6 Series
Medium-pressure medium-flow diaphragm valve for ultra-high purity applications. No internal threads or springs. GP/HP/UHP three process grades available.
HPHigh-Pressure Spring-Return Diaphragm Valve —DV7 Series
High-pressure spring-return diaphragm valve. Spring-return stem allows full operation under vacuum conditions. GP/HP/UHP three process grades available.
UHPAtomic Layer Deposition Diaphragm Valve —ALD Series
Ultra-fast ALD valve for atomic layer deposition. <15 ms response, PFA seat, up to 200 °C.
HPLow-Pressure Small-Flow Diaphragm Valve —DV1 Series
Low-pressure small-flow, Cv 0.3, up to 250 psig. Compact design, PCTFE or PFA seat. Manual or pneumatic.
HPLow-Pressure Medium-Flow Diaphragm Valve —DV2 Series
Low-pressure medium-flow, Cv 0.65, up to 250 psig. 6 mm bore, pneumatic or manual.
HPLow-Pressure High-Flow Diaphragm Valve —DV3 Series
Low-pressure large-flow diaphragm valve, Cv 2.8, 10.2 mm bore. Tied-diaphragm, 1/2" to 1" ports.
- Semiconductor fab gas stick isolation
- Specialty gas panel point-of-use
- Bulk gas distribution headers
- Process gas manifolds
Frequently Asked Questions
What diaphragm materials are available and how do I choose between Co-Ni alloy and Hastelloy C-22?
Co-Ni alloy diaphragms are the standard choice for most UHP semiconductor gases including N₂, Ar, He, and H₂, offering a balance of cycle life and corrosion resistance. Hastelloy C-22 diaphragms are specified for highly corrosive chemistries such as HCl, WF₆, BCl₃, and halogen-bearing gases where Co-Ni alloy may suffer accelerated fatigue. Consult the gas compatibility chart in the product datasheet and specify Hastelloy C-22 whenever the process gas has a chloride, fluoride, or strong oxidizer component.
What is the rated cycle life for KTIC diaphragm valves, and what factors shorten it?
Standard UHP diaphragm valves are rated for ≥150,000 full open/close cycles at the nominal operating pressure. Cycle life is reduced by operating above the rated pressure, by large ΔP across the diaphragm during actuation, by elevated temperatures above 85 °C, and by chemical attack on the diaphragm material. Pneumatic actuation with controlled supply pressure and gentle seating force extends service life compared to manual operation with excessive torque.
Is Hastelloy C-22 the required standard for all corrosive-gas diaphragm valves, or are there alternatives?
Hastelloy C-22 is the most common high-corrosion choice and is stocked in all standard port sizes. For ultra-high-purity fluorine or ClF₃ service, Monel 400 or nickel-body valves may be required instead. For moderate corrosion at lower pressures, PVDF-lined body options exist. Always cross-reference the specific gas, concentration, temperature, and pressure against the manufacturer's compatibility table before selecting a diaphragm/body combination.
How should VCR face-seal fittings be installed on diaphragm valve ports to ensure leak-tight connections?
VCR face-seal connections require a fresh silver-plated or stainless retainer gasket for every assembly. Clean all mating surfaces with IPA and inspect for scratches under magnification before assembly. Finger-tighten the nut until snug, then advance 1/8 turn (UHP) or 1/4 turn (standard) with a calibrated torque wrench — typically 100–125 in-lb for 1/4" and 200–225 in-lb for 1/2". Never re-use a compressed gasket. After assembly, perform a helium leak check to ≤1×10⁻⁹ atm·cc/s before pressurizing with process gas.
What is the correct purge procedure for diaphragm valves before introducing a reactive or toxic process gas?
Perform a minimum of five pressure-cycle purges using dry N₂ or Ar at the system's rated pressure. With the valve closed, pressurize the upstream side, then open the valve to purge through the downstream vent. For pyrophoric or highly toxic gases (WF₆, BCl₃), extend to ten purge cycles and verify residual moisture below 1 ppb with an inline moisture monitor before switching to process gas. Document purge cycle count, pressure, and moisture readings in the maintenance log.
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