Product
Key Advantages
- Hard-metal diaphragm face-seal —ultra-low leak rate
- Fast, repeatable pneumatic actuator
- Normally-closed (NC) and normally-open (NO) options
- Low-pressure (150 PSI) and high-pressure (2200 PSI) variants
- He leak rate ≥1×10?Pam/s (internal and external)
- Ra ≥0.13 μm electropolished internal surfaces
- Optional high-flow (HF) diaphragm for 1/2" size
- Optional micro-leak (-BL) configuration
Construction Material
| Parts | Material |
|---|---|
| Body | 316L SS / 316L VIM-VAR (optional) |
| Diaphragm | UNS R30003 (Co-Ni alloy) |
| Seat gasket | PCTFE |
| Surface finish | EP electropolished, Ra ≥0.13 μm |
Technical Specifications
Working pressure (LP)
Vacuum to 150 PSI (10.3 bar)
Working pressure (HP)
Vacuum to 2200 PSI (152 bar)
Burst pressure
LP 450 PSI / HP 6600 PSI
Flow coefficient (Cv)
1/4" = 0.25 / 1/2" = 0.35 / 1/2"HF = 0.7
Working temperature (LP)
-0 to 60 °C
Working temperature (HP)
-0 to 40 °C
Internal leak rate
≥1×10?Pam/s (He)
External leak rate
≥1×10?Pam/s (He)
Surface finish
Ra ≥0.13 μm (EP)
Port sizes
1/4" / 1/2" UCR face-seal
Configure & Order
Flow Path
Pressure Rating
Port Size
Port Type
Body Material
Actuator
Options
Part Number
DV-02 / I —Straight / 01 —Low Pressure (0—50 PSI) / 4 —1/4" UCR / M —Integral Male / SS —316L / C —Normally Closed (NC) / —Standard
Overview
The DP series pneumatic diaphragm valve shares the same hard-metal diaphragm face-seal structure as the DV manual series, adding a fast and repeatable pneumatic actuator for automated gas panel applications. Available in normally-closed (NC) and normally-open (NO) configurations. Low-pressure (Vac—50 PSI) and high-pressure (Vac—200 PSI) variants. Every valve is individually helium mass-spectrometer leak tested.
Dimensional Drawings
Drawing Pending
Manual Dimensions
| Port Type | L (mm) | h (mm) | H (mm) | A (mm) | B (mm) | C (mm) | D (mm) |
|---|---|---|---|---|---|---|---|
| Low Pressure | - | - | - | - | - | - | |
| 74M | 1/4" Integral Male | 11.1 | 82.8 | 18 | 18 | 27 | 40 |
| 74MS/74F | 1/4" Swivel Male / Female | 11.1 | 82.8 | 18 | 18 | 27 | 40 |
| 78M (HF) | 1/2" High Flow Integral Male | 16 | 89 | 20.2 | 20.2 | 36 | 55 |
| 78MS/78F (HF) | 1/2" High Flow Swivel / Female | 16 | 89 | 20.2 | 20.2 | 36 | 55 |
| High Pressure | - | - | - | - | - | - | |
| 74M | 1/4" Integral Male | 11.1 | 106.4 | 18 | 18 | 27 | 65 |
| 74MS/74F | 1/4" Swivel Male / Female | 11.1 | 106.4 | 18 | 18 | 27 | 65 |
| 78M | 1/2" Integral Male | 11.2 | 156.5 | 18 | 18 | 27 | 76 |
| 78MS/78F | 1/2" Swivel Male / Female | 11.2 | 156.5 | 18 | 18 | 27 | 76 |
Dimensions are for reference only and subject to change without notice.
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