Product
Key Advantages
- Hard-metal diaphragm face-seal —zero dead volume
- He leak rate ≥1×10?Pam/s (internal and external)
- Low-pressure (300 PSI) and high-pressure (3000 PSI) in one series
- 316L and 316L VIM-VAR body options for UHP service
- Ra ≥0.13 μm electropolished internal surfaces
- Individual helium mass-spectrometer leak test on every valve
- Optional high-flow (HF) diaphragm for 1/2" size
- Optional micro-leak (-BL) and front-panel-mount (-F) configurations
Construction Material
| Parts | Material |
|---|---|
| Body | 316L SS / 316L VIM-VAR (optional) |
| Diaphragm | UNS R30003 (Co-Ni alloy) |
| Seat gasket | PCTFE |
| Handle | Aluminum alloy 6063 |
| Surface finish | EP electropolished, Ra ≥0.13 μm |
Technical Specifications
Working pressure (LP)
Vacuum to 300 PSI (20.7 bar)
Working pressure (HP)
Vacuum to 3000 PSI (207 bar)
Burst pressure
LP 900 PSI / HP 9000 PSI
Flow coefficient (Cv)
1/4" = 0.25 / 1/2" = 0.35 / 1/2"HF = 0.7 / 3/4" = 1.0
Working temperature (LP)
-0 to 60 °C
Working temperature (HP)
-0 to 40 °C
Internal leak rate
≥1×10?Pam/s (He)
External leak rate
≥1×10?Pam/s (He)
Surface finish
Ra ≥0.13 μm (EP)
Port sizes
1/4" / 1/2" / 3/4" UCR face-seal
Configure & Order
Flow Path
Pressure Rating
Port Size
Port Type
Body Material
Handle Color
Options
Part Number
DV-01 / I —Straight / 01 —Low Pressure (0—00 PSI) / 4 —1/4" UCR / M —Integral Male / SS —316L / R —Red / —Standard
Overview
The DV series uses a hard-metal diaphragm face-seal structure with ultra-low helium leak rates, rated for UHP process gases including toxic and corrosive chemistries in VLSI fab environments. Both low-pressure (Vac—00 PSI) and high-pressure (Vac—000 PSI) variants share the same body envelope. Available in 1/4", 1/2" and 3/4" UCR face-seal port sizes. Every valve is individually helium mass-spectrometer leak tested before shipment.
Dimensional Drawings
Drawing Pending
Manual Dimensions
| Port Type | L (mm) | h (mm) | h1 (mm) | H (mm) | A (mm) | B (mm) | C (mm) | D (mm) | d (mm) |
|---|---|---|---|---|---|---|---|---|---|
| Low Pressure | - | - | - | - | - | - | - | - | |
| 74M | 1/4" Integral Male | 11.1 | 27.3 | 71 (77) | 18 | 18 | 27 | 48 | 20.5 |
| 74MS/74F | 1/4" Swivel Male / Female | 11.1 | 27.3 | 71 (77) | 18 | 18 | 27 | 48 | 20.5 |
| 78M | 1/2" Integral Male | 11.2 | 32 | 75 (81) | 20.2 | 20.2 | 35 | 48 | 20.5 |
| 78MS/78F | 1/2" Swivel Male / Female | 11.2 | 32 | 75 (81) | 20.2 | 20.2 | 35 | 48 | 20.5 |
| 78M (HF) | 1/2" High Flow Integral Male | 16 | 90.6 | 20.2 | 20.2 | 36 | 48 | ||
| 712M | 3/4" Integral Male | 23 | 93.3 | 24.75 | 24.75 | 46 | 70 | ||
| High Pressure | - | - | - | - | - | - | - | - | |
| 74M | 1/4" Integral Male | 11.1 | 32.5 | 71 (77) | 18 | 18 | 27 | 48 | 20.5 |
| 74MS/74F | 1/4" Swivel Male / Female | 11.1 | 32.5 | 71 (77) | 18 | 18 | 27 | 48 | 20.5 |
| 78M | 1/2" Integral Male | 11.2 | 48 | 77.7 | 18 | 18 | 27 | 48 | 20.5 |
| 78MS/78F | 1/2" Swivel Male / Female | 11.2 | 48 | 77.7 | 18 | 18 | 27 | 48 | 20.5 |
Dimensions are for reference only and subject to change without notice.
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