Product
Key Advantages
- Response time under 15 ms (open/close)
- Flow consistency within ±3%
- Heatesistant actuator option for hot zones (up to 200 °C)
- Fully enclosed seat —superior antixpansion and antiontamination
- Coi alloy diaphragm for enhanced strength and corrosion resistance
- Highurity PFA seat for broad chemical compatibility
- Multiple end connections: surface mount, tube butt weld, metal face seal
Construction Material
| Parts | Material |
|---|---|
| Actuator | Aluminum alloy |
| Heat shield (heatesistant only) | 316 SS / ASTM A479 |
| Connecting rod (heatesistant only) | S17400 / ASTM A564 |
| Guide tube (heatesistant only) | PTFE / ASTM D1710 |
| Bonnet nut | 316 SS / ASTM A479 |
| Bonnet | S17400 / ASTM A564 |
| Button | 316 SS / ASTM A479 |
| Diaphragm | Coi alloy |
| Seat | PFA / ASTM D3307 |
| Body | 316L / SEMI F20, or 316L VAR / SEMI F20, or 316L VIMAR / SEMI F20 |
Technical Specifications
Bore diam. (small)
4.1 mm (0.16 in.)
Bore diam. (large)
5.9 mm (0.23 in.)
Cv (small bore)
0.27
Cv (large bore)
0.62
Working pressure
Vacuum to 10 bar (145 psig)
NC actuator pressure
3.5—.2 bar (50—0 psig)
NO actuator pressure
4.9—.2 bar (70—0 psig)
Working temp. (standard)
0—20 °C (32—48 F)
Working temp. (heatesistant)
0—00 °C (32—92 F)
Internal leak rate (He)
≥1×10 std cm/s
External leak rate (He)
≥5×10 std cm/s
Process Specifications
| Requirement | GP | HP | UHP |
|---|---|---|---|
| Material / Spec | - | - | 316L / SEMI F20 316L VAR / SEMI F20 316L VIMAR / SEMI F20 |
| Surface roughness | - | - | Ra 5 in (0.13 μm) |
| Polishing | - | - | Electropolished |
| Packaging | - | - | Double bag |
| Cleanroom class | - | - | ISO 4 / Class 10 |
Configure & Order
1 - Body Material
2 - Suberies
3 - Flow Path
4 - Inlet Port
5 - Outlet Port
6 - Other Ports
7 - Actuator
8 - Options
9 - Process Grade
Part Number
DV-08 / 316L / ALD3 —Standard small bore / 2A —Straight / FMR4 —1/4" female faceeal / Same as inlet / Same as inlet / NC —Normally Closed / —Standard / UHP —Ultraigh Purity
Overview
XINVAL ALD series diaphragm valve delivers ultra-high-speed gas pulses for ALD processes in semiconductor manufacturing. Exceptional cycle life and flow repeatability within ±3%. Available with standard or heatesistant actuator for process temperatures up to 200 °C. Suitable for surfaceount, tube butteld and metal faceeal connections.
Dimensional Drawings
Drawing Pending
Manual Dimensions
| Order No. | Port Type | A (NC) | A (NO) | B (mm) |
|---|---|---|---|---|
| ALD32A-FMR4- | 1/4" Female Faceeal | 44.5 (1.75) | 40.9 (1.61) | 35.3 (1.39) |
| ALD32A-MR4- | 1/4" Integral Male | 57.0 (2.25) | 53.5 (2.11) | 29.2 (1.15) |
| ALD32A-SMR4- | 1/4" Swivel Male | |||
| ALD32A-TB4- | 1/4" Tube Butt Weld | |||
| ALD62A-FMR8- | 1/2" Female Faceeal | 47.8 (1.88) | 44.2 (1.74) | 53.0 (2.08) |
| ALD62A-SMR8- | 1/2" Swivel Male | 60.5 (2.38) | 57.0 (2.25) | 53.0 (2.08) |
| ALD62A-TB8- | 1/2" Tube Butt Weld |
Dimensions are for reference only and subject to change without notice.
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