Product
Key Advantages
- Small internal volume —minimal particle generation
- Fully enclosed seat design —superior anti-expansion and anti-contamination
- Spring-loaded design
- Co-Ni alloy diaphragm —enhanced strength and corrosion resistance
- Manual or pneumatic actuation
- Suitable for ultra-high purity applications
- GP / HP / UHP three process grades available
Construction Material
| Parts | Material |
|---|---|
| Handle | Aluminum alloy |
| Bonnet | S17400 / ASTM A564 |
| Bonnet nut | 316 SS / ASTM A479 |
| Button | 316 SS / ASTM A479 |
| Diaphragm | Co-Ni alloy |
| Seat support | 316 SS / ASTM A479 |
| Seat | PCTFE (standard) or Vespel PI |
| Spring | 316 SS / ASTM A313 |
| Body | 316 SS / ASTM A479, or 316L VAR / SEMI F20, or 316L VIM-VAR / SEMI F20 |
Technical Specifications
Bore diameter
7.5 mm (0.3 in.)
Port size
3/8" to 1/2", 10 mm to 12 mm
Flow coefficient (Cv)
0.8
Working pressure (manual)
Vacuum to 241 bar (3500 psig)
Working pressure (pneumatic)
Vacuum to 207 bar (3000 psig)
Max back pressure differential
103 bar (1500 psig)
Pneumatic actuator pressure
4.8 bar ~ 6.9 bar (70 psig ~ 100 psig)
Working temperature (PCTFE seat)
-3 °C to 65 °C (-0 F to 150 F)
Working temperature (PI seat)
-3 °C to 121 °C (-0 F to 250 F)
Internal leak rate
≥5×10 std cm/s (He)
External leak rate
≥5×10 std cm/s (He)
Seat leak rate
≥1×10 std cm/s (He)
Process Specifications
| Requirement | GP | HP | UHP |
|---|---|---|---|
| Material / Spec | 316L / A479 | 316L VAR / SMEI F20 316L / SEMI F20 | 316L / SEMI F20, 316L VAR / SEMI F20 316L VIM-VAR / SEMI F20 |
| Surface roughness | Ra 15 in (0.4 μm) | Ra 10 in (0.25 μm) | Ra 5 in (0.13 μm) |
| Polishing | Mechanical | Electropolished | Electropolished |
| Packaging | Single bag | Double bag | Double bag |
| Cleanroom class | ISO 6 / Class 1000 | ISO 4 / Class 10 |
Configure & Order
1 - Material
2 - Valve Series
3 - Flow Path
4 - Inlet Port
5 - Outlet Port
6 - Other Ports
7 - Actuator
8 - Seat Material
9 - Process Grade
Part Number
DV-05 / 316L —316L / DV5 — / 2A —Straight / FMR8 —1/2" ㈠ / (same as inlet / (same as inlet / (omit) — Manual / (omit) —PCTFE (default) / GP —ヨ
Overview
DV5 series high-pressure medium-flow diaphragm valve. Small internal volume with minimal particle generation. Fully enclosed seat design. Spring-loaded design. Co-Ni alloy diaphragm for enhanced strength and corrosion resistance. Manual or pneumatic actuation available. Suitable for ultra-high purity applications.
Dimensional Drawings
Drawing Pending
Manual Dimensions
| Order No. | Port Type | L (mm) | A (mm) |
|---|---|---|---|
| ♀-DV52A-MR8- | 1/2" MR | 40.1 (1.58) | 19.1 (0.75) |
| ♀-DV52A-FMR8- | 1/2" FMR | 49.5 (1.95) | 28.5 (1.12) |
| ♀-DV52A-TB6- | 3/8" Tube ″?TB | 90.9 (3.58) | 16.5 (0.65) |
| ♀-DV52A-TB8- | 1/2" Tube ″?TB | 90.9 (3.58) | 16.5 (0.65) |
| ♀-DV52A-TB10M- | 10 mm Tube ″?TB | 90.9 (3.58) | 16.5 (0.65) |
| ♀-DV52A-TB12M- | 12 mm Tube ″?TB | 90.9 (3.58) | 16.5 (0.65) |
| ♀-DV52A-F8- | 1/2" ″ F | 42.9 (1.69) | 21.9 (0.86) |
| ♀-DV52A-F10M- | 10 mm ″ F | 40.5 (1.59) | 19.5 (0.77) |
| ♀-DV52A-F12M- | 12 mm ″ F | 43.1 (1.70) | 22.1 (0.87) |
Dimensions are for reference only and subject to change without notice.
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