Valves

Bellows-Sealed Valves

Applications
  • Pyrophoric gas isolation (SiH₂? B₂H₆?
  • Toxic gas systems (AsH₂? PH₂? HF)
  • High-temperature gas delivery
  • Dopant gas distribution
Gas Service
SiH₂B₂H₆PH₂AsH₂HFHClCl₂

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