Available Series
4 Series Available
Select a series to view detailed specifications, dimensional drawings, and ordering information.
UHPBV-01
Pneumatic Bellows Globe Valve —QBV Series
Pneumatic bellows globe valve with S-shaped flow path. Compact design, low pressure drop, wide adjustability. NC up to 120 psig, NO up to 220 psig.
Working pressure (NC)
Vacuum to 120 psig (8.3 bar)
Working pressure (NO)
Vacuum to 220 psig (15.2 bar)
Flow coefficient (Cv) 1/4"
0.3
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UHPBV-02
Manual Bellows Globe Valve —HBV Series
Manual bellows globe valve with all-metal seal. Pressures up to 800 psig, temperatures up to 280 °C.
Max working pressure
800 psig (55 bar)
Flow coefficient (Cv)
0.3
Leak rate (He)
≥4×10 Pam/s
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UHPBV-03
Pneumatic Vacuum Bellows Angle Valve —QAV Series
Pneumatic vacuum bellows angle valve for high-vacuum process isolation. KF16/KF25, Cv 1.0/1.5, >5 million cycle life.
Working pressure
10 Pa to 0.5 MPa (vacuum to 5 bar)
Max differential pressure
30 psi (2 bar)
Flow coefficient (KF16)
1.0
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UHPBV-04
Manual Vacuum Bellows Angle Valve —HAV Series
Manual vacuum bellows angle valve with KF25 flanges. Compact design, 316L bellows, Ra ≥0.13 μm.
Working pressure
10 Pa to 0.2 MPa (vacuum to 2 bar)
Flow coefficient (Cv)
1.5
Leak rate (He)
≥1×10 Pam/s
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Applications
- Pyrophoric gas isolation (SiH₂? B₂H₆?
- Toxic gas systems (AsH₂? PH₂? HF)
- High-temperature gas delivery
- Dopant gas distribution
Gas Service
SiH₂B₂H₆PH₂AsH₂HFHClCl₂
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