Product
Key Advantages
- Hermetic bellows seal —zero stem leakage to atmosphere
- S-shaped flow path for low pressure drop and high flow
- Full pressure rating in both flow directions for system flexibility
- Available in NC (vacuum—20 psig) and NO (vacuum—20 psig) configurations
- Standard-temperature (-3 to 93 °C) and high-temperature (-3 to 180 °C) options
- Compact body design suitable for gas panel integration
- Every valve individually helium leak tested
Construction Material
| Parts | Material |
|---|---|
| Body | 316L / 316L VIM-VAR |
| Bellows | 316L |
| Seat insert (standard temp.) | PCTFE |
| Seat insert (high temp.) | PFA |
| Seal ring (standard temp.) | FKM |
| Seal ring (high temp.) | FFKM |
Technical Specifications
Working pressure (NC)
Vacuum to 120 psig (8.3 bar)
Working pressure (NO)
Vacuum to 220 psig (15.2 bar)
Flow coefficient (Cv) 1/4"
0.3
Flow coefficient (Cv) 1/2"
0.7
Leak rate (He)
≥4×10 Pam/s
Working temp. (standard)
-3 to 93 °C
Working temp. (high-temp.)
-3 to 180 °C
Surface finish
Ra ≥0.13 μm
Actuator pressure
0.5—.8 MPa (5— bar)
Port sizes
1/4", 1/2" UCR face-seal
Configure & Order
1 - Series
2 - Flow Path
3 - Pressure Rating
4 - Inlet Port
5 - Outlet Port
6 - Body Material
7 - Actuator
8 - Temperature Type
Part Number
BV-01 / QBV —Pneumatic Bellows Globe Valve / I —Straight / 01 —NC: Vacuum to 120 psig / NO: Vacuum to 220 psig / 74M —1/4" UCR male / Same as inlet / SS —316L / C —Normally Closed (NC) / N —Standard (-3 to 93 °C)
Overview
The QBV series pneumatic bellows globe valve features a compact body with an S-shaped flow path that minimizes pressure loss while delivering high flow and wide adjustability. The bellows seal provides hermetic isolation between the process medium and atmosphere, making it suitable for high-vacuum and toxic/corrosive gas service in semiconductor fabs. Available in standard-temperature and high-temperature configurations.
Dimensional Drawings
Drawing Pending
Manual Dimensions
| Connection | L (mm) | H (mm) | D (mm) |
|---|---|---|---|
| QBV-74F | 1/4" UCR Female | 93.5 | 11.4 |
| QBV-74M | 1/4" UCR Male | 93.5 | 11.4 |
| QBV-78F | 1/2" UCR Female | 99.5 | 17 |
| QBV-78M | 1/2" UCR Male | 99.5 | 17 |
Dimensions are for reference only and subject to change without notice.
Related Series
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