Product
Key Advantages
- High conductance angle body for vacuum service
- Hermetic bellows seal —no elastomers in the flow path
- Ultra-long cycle life —tested to >5,000,000 cycles
- Fast, repeatable pneumatic actuation
- Multiple flange types to meet diverse system needs
- Used to isolate process chambers from external atmosphere
Construction Material
| Parts | Material |
|---|---|
| Body | 316L / 316L VIM-VAR |
| Bellows | 316L |
| Seal ring | FKM |
| Screws | 304 |
Technical Specifications
Working pressure
10 Pa to 0.5 MPa (vacuum to 5 bar)
Max differential pressure
30 psi (2 bar)
Flow coefficient (KF16)
1.0
Flow coefficient (KF25)
1.5
Leak rate (He)
≥1×10 Pam/s
Working temperature
-0 to 125 °C
Surface finish
Ra ≥0.13 μm
Actuator pressure
0.5—.8 MPa (5— bar)
Cycle life
≥5,000,000
Configure & Order
1 - Series
2 - Flow Path
3 - Pressure Rating
4 - Inlet Port
5 - Outlet Port
6 - Body Material
7 - Actuator
8 - Temperature Type
Part Number
BV-03 / QAV —Pneumatic Vacuum Angle Valve / JR —Right Angle / 01 —10 Pa to 0.5 MPa / KF16 / Same as inlet / SS —316L / C —Normally Closed (NC) / N —Standard (-0 to 125 °C)
Overview
The QAV series pneumatic vacuum bellows angle valve delivers high conductance in a compact, durable design, making it the preferred choice for high-vacuum process isolation in semiconductor fabs. Recommended for vent, bypass, and roughing applications. The bellows extends and retracts with stem movement, providing hermetic isolation. Life expectancy exceeds 5 million cycles.
Dimensional Drawings
Drawing Pending
Manual Dimensions
| Order No. | Port Type | A (mm) | B (mm) | C (mm) | D (mm) | E (mm) | K (mm) |
|---|---|---|---|---|---|---|---|
| QAV-KF16 | KF16 | 35 | 22.2 | 54 | 44.5 | 61.5 | KF16 |
| QAV-KF25 | KF25 | 35 | 22.2 | 54 | 44.5 | 61.5 | KF25 |
Dimensions are for reference only and subject to change without notice.
Related Series
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