Product
Key Advantages
- SEMI C-seal and W-seal interface
- 0.003 um 9-LRV filtration
- EP Ra 0.13 um interior surface
- He leak rate 1x10^-11 cc/min
- 460 deg C max temperature
- 10-120 slpm flow range
Construction Material
| Parts | Material |
|---|---|
| Body | 316L SS EP |
| Filter media | 316L SS sintered powder |
Technical Specifications
Max inlet pressure
3.4 MPa (493 PSI) at 100 deg C
Max differential pressure
0.69 MPa
He verified
1x10^-11 cc/min
He tested
1x10^-9 cc/min
Efficiency
9-LRV at 0.003 um, 120 slpm
Max temperature
460 deg C
Flow range
0-120 slpm
Ra exterior
< 1.6 um
Ra interior
0.13 um EP
Downstream cleanliness
< 0.03 particles/L + < 10 ppb moisture
Configure & Order
1 - Series
2 - Flow Rate
3 - Filtration Rating
4 - Seal Interface
Part Number
IGSFT-01 / SF / SF-10S —10 slpm / 0.003 / C-seal
Overview
SF series IGS panel filters for semiconductor fab gas panels. C-seal and W-seal interface compatibility. 0.003 um filtration at 9-LRV efficiency. Flow range 10-120 slpm. Full 316L SS EP construction.
Dimensional Drawings
Drawing Pending
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