KTIC IndustrialRFQ
Products/Filters
Filters

SF Series IGS Panel Filters

Available Series

1 Series Available

Select a series to view detailed specifications, dimensional drawings, and ordering information.

SF Series IGS Panel FilterUHP
IGSFT-01

SF Series IGS Panel Filter

IGS panel filter, 0.003 um, 9-LRV at 120 slpm, C-seal and W-seal, 460 deg C, EP Ra 0.13 um.

Max inlet pressure
3.4 MPa (493 PSI) at 100 deg C
Max differential pressure
0.69 MPa
He verified
1x10^-11 cc/min
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Applications
  • Gas stick POU filtration
  • IGS panel protection
  • MFC/valve inlet protection
  • CVD/PVD/Etch process
Gas Service
N2ArHeH2NH3Process gases

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