9 Subcategories
Select a subcategory to view available series, specifications, and ordering information.
BF Series Bulk Gas Filters
High-flow bulk gas in-line filters for UHP process gas distribution.
TF Series Process Gas Filters
In-line process gas filters in F-type, T-type and W-type all-welded configurations.
SF Series IGS Panel Filters
Compact sintered 316L filters for semiconductor gas panels with SEMI C-seal and W-seal interfaces.
OF Series Online High-Flow Gas Filters
High-flow online gas filters for bulk gas and specialty gas supply, 0.003 um.
MF Series Instrument Protection Filters
Gasket-style instrument protection filters for MFC, valves, and pressure regulators.
HF Series High-Pressure Gas Filters
High-pressure gas filters for 500 bar gas delivery systems, replaceable element.
DF Series Diffuser Filters
Diffuser filters combining gas flow diffusion and particle filtration for process chamber venting.
KF Series Vacuum System Filters
KF flange vacuum system filters for semiconductor equipment clean rapid backfill.
RF Series Porous Metal Flow Restrictors
Porous metal flow restrictors for preventing accidental high gas flow in semiconductor process gas systems.
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