Available Series
3 Series Available
Select a series to view detailed specifications, dimensional drawings, and ordering information.
UHPFT-02
TF Series In-Line Process Gas Filter —F-Type
Compact straight-through in-line process gas filter, 207 bar, -28 to 482 deg C, ferrule and VCR connections.
Max pressure
207 bar (3000 psig)
Temperature range
-28 to 482 deg C
Filter area
2, 4, or 8 cm2
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UHPFT-03
TF Series Process Gas Filter —T-Type
Tee-body process gas filter with optional purge port, 414 bar (6000 psig), ferrule and VCR connections.
Max pressure
414 bar (6000 psig)
Temperature range
-28 to 482 deg C
Filter area
4 or 8 cm2
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UHPFT-04
TF Series Process Gas Filter —W-Type All-Welded
All-welded W-type process gas filter, 414 bar, large filter area, no elastomeric seals.
Max pressure
414 bar (6000 psig)
Temperature range
-28 to 482 deg C
Filter area
254 mm2 (mesh only)
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Applications
- Fab tool POU protection
- Gas panel outlet filtration
- MFC inlet protection
- Process gas purification
Gas Service
All UHP gases (select media per gas)
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