Product
Key Advantages
- Designed for GC, VMB & VMP applications
- Absolute pressure control: -5 inHg ~ 0 ~ 30 psig
- Metal-to-metal diaphragm seal for leak integrity
- Hastelloy internals available for corrosive gases
- Each unit individually pressure tested, function tested, helium leak tested, and particle inspected
Construction Material
| Parts | Material |
|---|---|
| Body | 316L / 316L VIM-VAR |
| Diaphragm | UNS N06022 (Hastelloy C-22) |
| Poppet | 316L / UNS N10276 |
| Seat insert | PCTFE / PI |
| Handle | ABS |
| Bonnet | 316L |
Technical Specifications
Max inlet pressure
150 psig (10.3 bar)
Outlet pressure range
-5 inHg ~ 0 ~ 30 psig
Flow coefficient (Cv)
0.09
Operating temperature
-0 to 70 °C (-0 to 158 F)
External leak rate (He)
≥1×10?Pam/s
Internal surface finish
Ra ≥0.13 μm
Port size
1/4—UCR face-seal
Process Specifications
| Requirement | GP | HP | UHP |
|---|---|---|---|
| Material / Spec | 316L / A479 | 316L / SEMI F20 | 316L VIM-VAR / SEMI F20 |
| Surface roughness | Ra 15 in (0.4 μm) | Ra 10 in (0.25 μm) | Ra 5 in (0.13 μm) |
| Polishing | Mechanical | Electropolished | Electropolished |
| Packaging | Single bag | Double bag | Double bag |
| Cleanroom class | ISO 6 / Class 1000 | ISO 4 / Class 10 |
Configure & Order
1 - Series
2 - Outlet Pressure
3 - Port Config
4 - Structure
5 - Material
6 - High-Pressure Gauge
7 - Low-Pressure Gauge
8 - Inlet Port
9 - Outlet Port
10 - Gauge Port
Part Number
REGL-02 / Xα-VL / 74F / 2P —2 ports / T —Tied diaphragm / SS —316L / C —None / C —None / 74F —1/4—UCR Female / 74I —1/4—UCR internal
Overview
The Xα-VL is a single-stage absolute pressure regulator designed for vacuum outlet applications in gas chromatography (GC) and VMB/VMP systems. Metal-to-metal diaphragm seal ensures superior leak integrity. Provides stable absolute pressure control from vacuum to low positive pressure for analytical and semiconductor gas distribution applications.
Dimensional Drawings
Drawing Pending
Related Series
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