REGL-01
MGDS Integrated Gas Distribution Regulator —Um-1L Series
Product
Key Advantages
- Designed for integrated gas distribution systems
- Tied-diaphragm metal seal for ultra-low leak rate
- Exceptional repeatability and stability
- Fast response to step function changes
- Each unit pressure tested, function tested, helium leak tested, and particle inspected
Construction Material
| Parts | Material |
|---|---|
| Body | 316L VIM-VAR |
| Diaphragm | UNS N06022 (Hastelloy C-22) |
| Poppet | 316L VIM-VAR / UNS N06022 |
| Seat insert | PCTFE |
| Handle | 6063 |
| Bonnet | 316L |
Technical Specifications
Max inlet pressure
250 psig (17.2 bar)
Outlet pressure range
10, 30, 60, 100 psig
Flow coefficient (Cv)
0.08
Supply pressure effect
0.3 psig / 20 psig
Operating temperature
-0 to 60 °C (-0 to 140 F)
External leak rate (He)
≥1×10?Pam/s
Internal surface finish
Ra ≥0.13 μm
Port size
1.125—/ 1.5—C-seal or 1/4—UCR
Process Specifications
| Requirement | GP | HP | UHP |
|---|---|---|---|
| Material / Spec | - | - | 316L VIM-VAR / SEMI F20 |
| Surface roughness | - | - | Ra 5 in (0.13 μm) |
| Polishing | - | - | Electropolished |
| Packaging | - | - | Double bag |
| Cleanroom class | - | - | ISO 4 / Class 10 |
Configure & Order
1 - Series
2 - Outlet Pressure
3 - Port Config
4 - Structure
5 - Material
6 - Port Type
Part Number
REGL-01 / Um-1L / 10 —10 psig / 2P —2 ports / T —Tied diaphragm / VV —316L VIM-VAR + 316L VIM-VAR / 1.125C —1-1/8—C-seal
Overview
The Um-1L MGDS regulator is designed for integrated gas distribution systems in semiconductor fabs. Tied-diaphragm metal seal structure with ultra-low leak rate ensures contamination-free gas delivery. Exceptional repeatability, stability, and fast step response make it ideal for multi-point gas distribution panels.
Dimensional Drawings
Drawing Pending
Related Series
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