GAG-02
UHP28 Series Compact UHP Pressure Gauge
Product
Key Advantages
- VCR, C-seal and W-seal process connections
- 28mm ultra-compact body
- EP polished Ra 0.13 um wetted surfaces
- He leak test 1x10^-10 Pa m3/s
- 316L VIM/VAR wetted material option
Construction Material
| Parts | Material |
|---|---|
| Wetted parts | 316L SS / 316L VIM/VAR |
Technical Specifications
Dial size
28mm
Pressure range
-30 in.Hg/30PSI to -30 in.Hg/100PSI
Accuracy
plus or minus 3% FS at 25 deg C
Process connection
1/4 in FVCR, 1/4 in MVCR, C-Seal (1.125 or 1.5 in), W-Seal (1.125 or 1.5 in)
Configure & Order
1 - Series
2 - Process Connection
3 - Pressure Range
Part Number
GAG-02 / UHP28 / M —MVCR / Custom input
Overview
UHP28 series compact UHP pressure gauge for semiconductor gas panels where space is critical. 28mm body size, axial mounting. All wetted parts 316L VIM/VAR EP Ra 0.13 um. 100% helium mass spectrometer leak test.
Dimensional Drawings
Drawing Pending
Request a Quote
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