Available Series
2 Series Available
Select a series to view detailed specifications, dimensional drawings, and ordering information.
UHPFTG-06
G Series Metal Face-Seal Fittings
Metal gasket face-seal fittings for UHP gas systems. 316L SS, EP Ra ≥.13 μm, He leak ≥×10?atmcc/s. VCR-compatible.
Type
Metal face-seal
Body material
316L SS / 316L VIM-VAR
Surface finish (UHP)
Ra ≥.13 μm EP
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HPFTG-07
O Series O-Ring Face-Seal Fittings
O-ring face-seal fittings for vacuum and low-pressure UHP service. 316L SS, EP Ra ≥.25 μm, leak tested with argon.
Type
O-ring face-seal
Body material
316L SS
O-ring material
FKM / PTFE / FFKM / Buna / EPDM
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Applications
- UHP gas distribution
- Specialty gas panels
- CVD and ALD systems
- High-vacuum applications,All UHP and specialty gases
Gas Service
All UHP gasesSiH₂WF₆BCl₃HClNH₂
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