UHPFT-03
RF Series Porous Metal Flow Restrictor
Product
Key Advantages
- 0.1 sccm to 40 slpm flow range
- 1/4 in VCR connection
- 460 deg C max temperature
- He leak rate 1x10^-4 cc/min
- Robust construction, easy replacement
Construction Material
| Parts | Material |
|---|---|
| Restrictor element | Porous sintered metal |
| Body | 316L SS |
Technical Specifications
Flow range
0.1 sccm to 40 slpm (customizable)
Max differential pressure
1500 psig
Accuracy
plus or minus 7.5%
Repeatability
plus or minus 0.1%
Max temperature
460 deg C
He leak rate
1x10^-4 cc/min
Connection
1/4 in VCR
Configure & Order
1 - Flow Range
2 - Connection
Part Number
UHPFT-03 / 0.1-1 sccm / 1/4 in VCR
Overview
RF series porous metal flow restrictors installed in process gas supply lines to prevent accidental high flow. Combined with gas resistance fittings for flow rate limiting in semiconductor process gas delivery systems.
Dimensional Drawings
Drawing Pending
Request a Quote
Submit an RFQ for UHPFT-03 RF Series Porous Metal Flow Restrictor. Our team responds with pricing and availability within 24 hours.