FT-06
MF Series Instrument Protection Filter
Product
Key Advantages
- VCR 1/4 in, 3/8 in and 1/2 in compatible
- Gasket-style —no welding required
- HP and LP versions available
- 400 deg C max temperature
- 9-LRV at 0.3 um
Construction Material
| Parts | Material |
|---|---|
| Filter media | 316L SS sintered powder |
| Body/gasket | 316L SS |
Technical Specifications
Max temperature
400 deg C
Efficiency
9-LRV at 0.3 um at 100 slpm
HP diff. pressure (1/4 in)
10.4 MPa (1508 psi)
HP diff. pressure (1/2 in)
2.9 MPa (421 psi)
LP max pressure
0.98 MPa (142 psi)
VCR seal size
1/4 in / 1/2 in / 3/4 in VCR
Configure & Order
1 - Version
2 - Filtration Rating
3 - VCR Seal Size
Part Number
FT-06 / HP —High pressure / 0.3 / 1/4 in VCR
Overview
MF series instrument protection filters for semiconductor gas distribution systems. All-metal, gasket-style installation compatible with VCR interfaces. Protects MFCs, precision valves and pressure regulators from particle contamination.
Dimensional Drawings
Drawing Pending
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