Product
Key Advantages
- KF16 to KF100 flange sizes
- 3,000,000 cycle service life
- Inline and angled configurations
- 0.2 to 20 um filtration options
- 6.89 bar max inlet pressure
Construction Material
| Parts | Material |
|---|---|
| Filter media | 316L SS sintered |
| Flange | 316L SS |
Technical Specifications
Max inlet pressure
6.89 bar
Max differential pressure
3 bar
Filtration rating
0.2 / 0.5 / 2 / 5 / 10 / 20 um
Flange sizes
KF16 / KF25 / KF40 / KF50 / KF100
Service life
3,000,000 cycles
Configure & Order
1 - Type
2 - Filtration Rating
3 - KF Flange Size
Part Number
UHPFT-02 / Inline / 0.2 / KF16
Overview
KF series vacuum system filters for clean rapid backfill in semiconductor equipment vacuum chambers. Easy KF flange installation. 3,000,000 cycle service life. Available in inline and angled configurations.
Dimensional Drawings
Drawing Pending
Request a Quote
Submit an RFQ for UHPFT-02 KF Series Vacuum System Gas Filter. Our team responds with pricing and availability within 24 hours.