Product
Key Advantages
- Combined diffuser and filter function
- 0.003 um filtration
- 400 deg C max temperature
- All 316L SS construction
- Reduces turbulence in process chambers
- VCR inlet and ISO NW outlet connections
Construction Material
| Parts | Material |
|---|---|
| Filter media | 316L SS sintered powder |
| Housing | 316L SS |
Technical Specifications
Max inlet pressure
4 bar
Max differential pressure
5 bar
Max temperature
400 deg C
Filtration rating
10-0.003 um (customizable)
Inlet connection
1/4 in VCR
Outlet connection
ISO NW16/25/40/50/100
Configure & Order
1 - Type
2 - Filtration Rating
3 - Inlet
4 - Outlet
Part Number
UHPFT-01 / Standard diffuser / 0.003 / 1/4 in VCR / ISO NW16
Overview
DF series diffuser filters for semiconductor process chamber venting. Combines diffuser gas flow characteristics with high-efficiency particle filtration. Prevents particle stirring and wafer displacement. Customizable for various installation spaces.
Dimensional Drawings
Drawing Pending
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