PTD-VAC
RVG Series Capacitance Diaphragm Vacuum Gauge
Product
Key Advantages
- plus or minus 0.5% of reading accuracy
- Unlimited resolution
- Inconel wetted material —corrosive gas compatible
- 0-1 to 0-1000 Torr ranges
- EMC compliant
Construction Material
| Parts | Material |
|---|---|
| Wetted material | Inconel |
| Housing | Stainless steel |
Technical Specifications
Accuracy
plus or minus 0.5% of reading
Ranges
0-1 / 0-10 / 0-100 / 0-1000 Torr
Output
0-10 VDC or 0-5 VDC
Process connection
0.25/0.5 in OD tube, KF flange, VCR
Configure & Order
1 - Output Signal
2 - Range
3 - Process Connection
Part Number
PTD-VAC / S3 —0-10 V / 1 —0-1 Torr / 4F —1/4 in FVCR
Overview
RVG series metal capacitance diaphragm vacuum gauge for precise and repeatable vacuum measurement. Inconel wetted material compatible with corrosive gases. Used in semiconductor process chambers, PECVD, plasma etch, and nuclear applications.
Dimensional Drawings
Drawing Pending
Related Series
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