PTD-04
U-S10 Series UHP Pressure Switch
Product
Key Advantages
- All-welded construction —no O-rings
- Gauge (UGS10), vacuum (UVS10) and absolute (UAS10) types
- 316L VIM/VAR wetted material
- He leak test 1x10^-9 std-cc/sec
- VCR and C-seal connections
- IP67 protection
Construction Material
| Parts | Material |
|---|---|
| Diaphragm | 316L SS |
| Process connection | 316L VIM/VAR |
Technical Specifications
Protection
IP67
Process connection
1/4 in MVCR, 1.125 in C-seal
Switch type
One SPDT
He leak rate
1x10^-9 std-cc/sec
Configure & Order
1 - Model
2 - Process Connection
3 - Set Point
Part Number
PTD-04 / UGS10 —Gauge pressure / M —1/4 in MVCR / Custom —e.g. 75torr
Overview
U-S10 series UHP pressure switch for semiconductor IGS panels. All-welded monolithic construction with no O-rings. 316L VIM/VAR wetted material. He leak test 1x10^-9 std-cc/sec. Class 100 cleanroom packaged.
Dimensional Drawings
Drawing Pending
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